Lower-Temperature processing of potassium niobate films by microwave-Assisted hydrothermal deposition technique

Masaki Okura, Yoshiharu Ito, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Hiroshi Funakubo, Hiroshi Uchida

研究成果: ジャーナルへの寄稿記事査読

1 被引用数 (Scopus)

抄録

Low-Temperature processing based on microwave-Assisted hydrothermal synthesis was proposed for deposition of piezoelectric oxoate KNbO3 films. The films were deposited on various substrates at reaction temperature below 200 °C using Nb2O5 powder and KOH solution. Epitaxial (100)c KNbO3 film with 1.3 m-Thick was deposited at a reaction temperature of 150 °C on (100)cSrRuO3//(100)SrTiO3 using 12 moldm 3 KOH solution for 80 min, which is significantly faster than conventional hydrothermal process.

本文言語英語
ページ(範囲)123-130
ページ数8
ジャーナルJournal of the Ceramic Society of Japan
130
1
DOI
出版ステータス出版済み - 1 1月 2022

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