抄録
Oxygen-deficient TiO2 (TiO2-x) has been proposed as a visible-light-responsive photocatalyst. TiO2%x thin films were prepared by Ar/H2 plasma surface treatment, applying varying levels of microwave input power and processing times. The highest visible light photocatalytic activity was observed when using an input power of 200W, a plasma processing time of 10min, and a 1 : 1 Ar : H2 ratio, conditions that generate an electron temperature of 5.7(±1.0) eV and an electron density of 8.5 × 1010cm-3. The maximum formaldehyde (HCHO) removal rate of the TiO2%x film was 2.6 times higher than that obtained from a TiO2-xNx film under the same test conditions.
本文言語 | 英語 |
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論文番号 | 01AE04 |
ジャーナル | Japanese Journal of Applied Physics |
巻 | 54 |
号 | 1 Supplement |
DOI | |
出版ステータス | 出版済み - 1 1月 2015 |