TY - JOUR
T1 - Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering
AU - Yoshizawa, Kazuma
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Ito, Yoshiharu
AU - Tateyama, Akinori
AU - Funakubo, Hiroshi
AU - Wakabayashi, Tsuyoshi
AU - Shibata, Kenji
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021
Y1 - 2021
N2 - In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.
AB - In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.
KW - BAW property
KW - KNN thin film
KW - SAW property
UR - https://www.scopus.com/pages/publications/85122860652
U2 - 10.1109/IUS52206.2021.9593374
DO - 10.1109/IUS52206.2021.9593374
M3 - Conference article
AN - SCOPUS:85122860652
SN - 1948-5719
JO - IEEE International Ultrasonics Symposium, IUS
JF - IEEE International Ultrasonics Symposium, IUS
T2 - 2021 IEEE International Ultrasonics Symposium, IUS 2021
Y2 - 11 September 2011 through 16 September 2011
ER -