Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering

Kazuma Yoshizawa, Masashi Suzuki, Shoji Kakio, Yoshiharu Ito, Akinori Tateyama, Hiroshi Funakubo, Tsuyoshi Wakabayashi, Kenji Shibata

研究成果: ジャーナルへの寄稿会議記事査読

抄録

In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.

本文言語英語
ジャーナルIEEE International Ultrasonics Symposium, IUS
DOI
出版ステータス出版済み - 2021
イベント2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, 中国
継続期間: 11 9月 201116 9月 2011

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