Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K0.88Na0.12)NbO3 film

Akinori Tateyama, Yoshiharu Ito, Takahisa Shiraishi, Minoru Kurosawa, Mutsuo Ishikawa, Hiroshi Funakubo

研究成果: ジャーナルへの寄稿記事査読

5 被引用数 (Scopus)

抄録

Two types of vibrators using hydrothermally synthesized ferroelectric (K, Na)NbO3 films were fabricated on SrTiO3 substrates. Cantilever piezoelectric vibrators with film thicknesses of 3.5-22.3 μm were used under low-frequency and no resonance drive. The obtained output displacement increased almost linearly as the film thickness increased under both unipolar and bipolar drives. The obtained transverse piezoelectric coefficient, e 31,f, was almost independent of film thickness, ≈−5 C m−2. On the other hand, a longitudinal piezoelectric vibrator was used under the resonance of half-length longitudinal vibration. The electromechanical coupling factor, k eff2, and the mechanical quality factor, Q m, were evaluated. k eff2 and Q m respectively increased from 0.14% to 1.23% and decreased from 556 to 224 as the film thickness increased from 2.5 to 26 μm. By applying a large voltage of 50 V0-p, a large vibration velocity of 1.5 m s−1 was obtained for the vibrator with a film thickness of 26 μm.

本文言語英語
論文番号SN1016
ジャーナルJapanese Journal of Applied Physics
61
SN
DOI
出版ステータス出版済み - 1 11月 2022

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