Rapid deposition of (K,Na)NbO3thick films using microwave-assisted hydrothermal technique

Hiroshi Uchida, Masaki Okura, Yoshiharu Ito, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Hiroshi Funakubo

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7 Citations (Scopus)


Rapid processing for hydrothermal deposition of (K,Na)NbO3 (KNN) thick films was proposed with the assistance of microwave (MW) heating, for short-time fabrication of ferroelectric/piezoelectric films with thicknesses of several micrometers within 1 h. MW irradiation raised the temperature of water medium up to 240 ?C within 10 min, whereas conventional heating using hot-air convection required more than 2 h. Epitaxial KNN films were successfully deposited on single-crystal substrates of (100)SrTiO3:Nb and (100)SrRuO3//(100)SrTiO3 at reaction temperature of 180 ?C-240 ?C within 1 h; especially, the films with thicknesses over 10 μm could be obtained on at 220 ?C for 40 min. The resulting film exhibited domain structure and dielectric/ferroelectric properties comparable with the KNN films derived from conventional hydrothermal deposition.

Original languageEnglish
Article numberSPPB02
JournalJapanese Journal of Applied Physics
Issue numberSP
Publication statusPublished - 1 Nov 2020
Externally publishedYes


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