Preparation of (001)c-oriented epitaxial (K, Na)NbO3 thick films by repeated hydrothermal deposition technique

  • Takahisa Shiraishi
  • , Yoshiharu Ito
  • , Mutsuo Ishikawa
  • , Hiroshi Uchida
  • , Takanori Kiguchi
  • , Minoru K. Kurosawa
  • , Hiroshi Funakubo
  • , Toyohiko J. Konno

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

(001)c-oriented (K0.86Na0.14)NbO3 thick films were prepared at 240°C on (100)cSrRuO3//(100)SrTiO3 substrates by repeated hydrothermal deposition technique. The film thickness was found to increase linearly with the number of deposition cycles, and 60 ¯m-thick film was obtained after nine repetitions of the deposition. The K/(K+Na) ratio of the deposited thick films, measured by X-ray fluorescence spectroscopy, showed constant values regardless of the number of deposition cycles. Cross-sectional scanning electron microscopy images revealed uniformity of the obtained dense films with no obvious micro cracks and pores. Structural characterization based on X-ray diffraction, XRD 2ª-½ patterns and X-ray pole figure measurement, showed that the epitaxial relationship between the films and substrates with a (001)c orientation was maintained throughout the deposition cycles. In addition, cross-sectional Raman spectra showed that 60 ¯m-thick (K0.86Na0.14)NbO3 film had an orthorhombic structure. The dielectric constant, ¾r, and tan ¤ showed frequency dependence.

Original languageEnglish
Pages (from-to)281-285
Number of pages5
JournalJournal of the Ceramic Society of Japan
Volume126
Issue number5
DOIs
Publication statusPublished - May 2018
Externally publishedYes

Keywords

  • (K
  • Epitaxial growth
  • Hydrothermal method
  • Low-temperature deposition
  • Na)NbO3 film
  • Thick film

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