Abstract
Low-Temperature processing based on microwave-Assisted hydrothermal synthesis was proposed for deposition of piezoelectric oxoate KNbO3 films. The films were deposited on various substrates at reaction temperature below 200 °C using Nb2O5 powder and KOH solution. Epitaxial (100)c KNbO3 film with 1.3 m-Thick was deposited at a reaction temperature of 150 °C on (100)cSrRuO3//(100)SrTiO3 using 12 moldm 3 KOH solution for 80 min, which is significantly faster than conventional hydrothermal process.
| Original language | English |
|---|---|
| Pages (from-to) | 123-130 |
| Number of pages | 8 |
| Journal | Journal of the Ceramic Society of Japan |
| Volume | 130 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 2022 |
Keywords
- Crystal growth
- Crystal orientation
- Dielectrics
- Epitaxial growth
- Ferroelectrics
- Hydrothermal synthesis
- Potassium niobate
- Thin film