Abstract
Oxygen-deficient TiO2 (TiO2-x) has been proposed as a visible-light-responsive photocatalyst. TiO2%x thin films were prepared by Ar/H2 plasma surface treatment, applying varying levels of microwave input power and processing times. The highest visible light photocatalytic activity was observed when using an input power of 200W, a plasma processing time of 10min, and a 1 : 1 Ar : H2 ratio, conditions that generate an electron temperature of 5.7(±1.0) eV and an electron density of 8.5 × 1010cm-3. The maximum formaldehyde (HCHO) removal rate of the TiO2%x film was 2.6 times higher than that obtained from a TiO2-xNx film under the same test conditions.
Original language | English |
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Article number | 01AE04 |
Journal | Japanese Journal of Applied Physics |
Volume | 54 |
Issue number | 1 Supplement |
DOIs | |
Publication status | Published - 1 Jan 2015 |