Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering

Kazuma Yoshizawa; Masashi Suzuki; Shoji Kakio; Yoshiharu Ito; Akinori Tateyama; Hiroshi Funakubo; Tsuyoshi Wakabayashi; Kenji Shibata

doi:10.1109/IUS52206.2021.9593374

Evaluation of BAW and SAW Properties of (K, Na)NbO₃Thin Films Deposited by RF Sputtering

Kazuma Yoshizawa
, Masashi Suzuki
, Shoji Kakio
, Yoshiharu Ito
, Akinori Tateyama
, Hiroshi Funakubo
, Tsuyoshi Wakabayashi
, Kenji Shibata

College of Industrial Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.

Original language	English
Journal	IEEE International Ultrasonics Symposium, IUS
DOIs	https://doi.org/10.1109/IUS52206.2021.9593374
Publication status	Published - 2021
Event	2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China Duration: 11 Sept 2011 → 16 Sept 2011

Keywords

BAW property
KNN thin film
SAW property

Access to Document

10.1109/IUS52206.2021.9593374

Cite this

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title = "Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering",

abstract = "In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4\% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\textbackslash{}\{dB\} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.",

keywords = "BAW property, KNN thin film, SAW property",

author = "Kazuma Yoshizawa and Masashi Suzuki and Shoji Kakio and Yoshiharu Ito and Akinori Tateyama and Hiroshi Funakubo and Tsuyoshi Wakabayashi and Kenji Shibata",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE International Ultrasonics Symposium, IUS 2021 ; Conference date: 11-09-2011 Through 16-09-2011",

year = "2021",

doi = "10.1109/IUS52206.2021.9593374",

language = "English",

journal = "IEEE International Ultrasonics Symposium, IUS",

issn = "1948-5719",

publisher = "IEEE Computer Society",

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TY - JOUR

T1 - Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering

AU - Yoshizawa, Kazuma

AU - Suzuki, Masashi

AU - Kakio, Shoji

AU - Ito, Yoshiharu

AU - Tateyama, Akinori

AU - Funakubo, Hiroshi

AU - Wakabayashi, Tsuyoshi

AU - Shibata, Kenji

PY - 2021

Y1 - 2021

N2 - In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.

AB - In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.

KW - BAW property

KW - KNN thin film

KW - SAW property

UR - https://www.scopus.com/pages/publications/85122860652

U2 - 10.1109/IUS52206.2021.9593374

DO - 10.1109/IUS52206.2021.9593374

M3 - Conference article

AN - SCOPUS:85122860652

SN - 1948-5719

JO - IEEE International Ultrasonics Symposium, IUS

JF - IEEE International Ultrasonics Symposium, IUS

T2 - 2021 IEEE International Ultrasonics Symposium, IUS 2021

Y2 - 11 September 2011 through 16 September 2011

ER -

Evaluation of BAW and SAW Properties of (K, Na)NbO₃Thin Films Deposited by RF Sputtering

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Keywords

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