Evaluation of BAW and SAW Properties of (K, Na)NbO3Thin Films Deposited by RF Sputtering

Kazuma Yoshizawa, Masashi Suzuki, Shoji Kakio, Yoshiharu Ito, Akinori Tateyama, Hiroshi Funakubo, Tsuyoshi Wakabayashi, Kenji Shibata

Research output: Contribution to journalConference articlepeer-review


In this study, the BAW and SAW properties of (001)-oriented (K, Na)NbO3 (KNN) thin films deposited using an RF magnetron sputtering system were evaluated to investigate the applicability of such thin films to high-frequency devices. As a result, a longitudinal wave phase velocity of 7, 850 m/s and an electromechanical coupling coefficient of 7.4% were obtained. From the measured SAW properties, the responses of the zeroth and first modes of the Rayleigh-type SAW were observed. For the zeroth mode, a propagation loss of 0.13\{dB} (wavelength) and a frequency temperature coefficient of -41.5 ppm/°C were obtained.

Original languageEnglish
JournalIEEE International Ultrasonics Symposium, IUS
Publication statusPublished - 2021
Event2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
Duration: 11 Sept 201116 Sept 2011


  • BAW property
  • KNN thin film
  • SAW property


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